Course Information

ME5653 Microelectromechanical Systems

Credits: 3.00

Description:
The course covers materials for MEMS, fundamentalof solid mechanics, electrostatics and electromagnetics. Topics: Electromechanical modeling and design of micromachined sensors and actuators. Microscale physics of microsystems. Overview of MEMS applications. Packaging and testing.

Prerequisite: Graduate standing or advisor approval